Complete Low Vacuum Bell Jar System
Evaporation
Thermal and E-Beam Evaporation
Zeolites are alkali metal aluminosilicates which caaan be dehydrated
without changing their crystal lattice. As a result various molecules of
certain gases can occupy the spaces left by the removal of water. The process
is triggered by cooling the zeolites down to LN2 temperatures.
The advantage of the system is that it is very clean. Current is passed
through a boat or basket and resistive heating is used to melt the metal.
Mechanical Pumps
Rotary piston type - The pump compresses the air and removes it.
This type of system requires oil and oil often times contaminates the chamber.
Getters Pumps
Getters are materials included in a vacuum system or device for removing
gas by sorption. Various metal evaporated - Au, Al, Cr, Ni, Ti, In, Zn,
AuGe, SiAl
E-Beam Evaporation
An electron beam is focused on the metal to be evaporated, this raises the temperature locally on the metal and substance melts. Metals deposited using this technique are Mo, Ta, W, Av, Cr, Ti.